May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.04.02
Time-Resolved Ion and Electron Energy Distributions in a HiPIMS Discharge with Cathode Voltage Reversal
When and Where
May 10, 2022
8:45am - 9:00am
8:45am - 9:00am
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
David Ruzic1,Zachary Jeckell1,Wolfgang Huber2,Thomas Houlahan2,David Barlaz1,Ian Haehnlein2,Brian Jurczyk2
University of Illinois at Urbana Champaign1,Starfire Industries, LLC2
Keywords
porosity | sputtering
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Mark Kushner
David Staack