May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.03.06
High Capacitance MIM Capacitors with Crystallized TiO2 Films by Plasma-Assisted Atomic Layer Annealing
When and Where
May 9, 2022
4:00pm - 4:15pm
4:00pm - 4:15pm
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
Seunghyeon Lee1,Dohyun Go1,Jeong Woo Shin1,Keunhoi Kim2,1,ChungMo Yang2,Jihwan An1
Seoul National University of Science and Technology1,National NanoFab Center2
Keywords
atomic layer deposition | crystallization
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Jane Chang
Nathan Marchack