May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.08.11

Plasma Etching Behavior of PVT and CVD SiC in Harsh Environments

When and Where

May 10, 2022
5:00pm - 7:00pm
Hawai'i Convention Center, Level 1, Kamehameha Exhibit Hall 2 & 3

Presenter(s)

Co-Author(s)

Jongbeom Kim1,Je Hoon Oh1,Je Jun Jeong1,Kyu Hwan Oh1

Seoul National University1

Keywords

defects | grain boundaries | inorganic

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Santanu Bag
Mandakini Kanungo

In this Session