May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ01.13.04
Comparative Spectroscopic Study of Aluminum Nitride Grown by MOCVD in Hydorgen and Nitrogen Reaction Environment
When and Where
May 23, 2022
11:45am - 12:00pm
11:45am - 12:00pm
EQ01-Virtual
Presenter(s)
Co-Author(s)
Samiul Hasan1,Mohi Uddin Jewel1,Stavros Karakalos1,Mikhail Gaevski2,Iftikhar Ahmad1
University of South Carolina1,CVD Equipment Corporation2
Keywords
chemical vapor deposition (CVD) (deposition) | nitride
Symposium Organizers
Robert Kaplar, Sandia National Laboratories
Srabanti Chowdhury, Stanford University
Yoshinao Kumagai, Tokyo University of Agriculture and Technology
Julien Pernot, University of Grenoble Alpes
Session Chairs
Mahesh Neupane