May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ01.06.05
Thermal and Electrical Properties of Wide Bandgap Nitride Thin Films Deposited at Low Temperatures for Heterogeneous Integration
When and Where
May 11, 2022
9:30am - 9:45am
9:30am - 9:45am
Hawai'i Convention Center, Level 3, 318B
Presenter(s)
Co-Author(s)
Michelle Chen1,Christopher Perez1,Scott Ueda2,Aaron Mcleod2,Victoria Chen1,Zachary Sobell3,Cagil Koroglu1,Asir Intisar Khan1,Steven George3,Andrew Kummel2,Kenneth Goodson1,Eric Pop1
Stanford University1,University of California, San Diego2,University of Colorado Boulder3
Keywords
dielectric properties | nitride | thermal conductivity
Symposium Organizers
Robert Kaplar, Sandia National Laboratories
Srabanti Chowdhury, Stanford University
Yoshinao Kumagai, Tokyo University of Agriculture and Technology
Julien Pernot, University of Grenoble Alpes
Session Chairs
Alan Doolittle