Diamond Growth by Microwave Plasma CVD for Electronic Devices

When and Where

May 10, 2022
1:30pm - 2:00pm

Hawai'i Convention Center, Level 3, 318B

Presenter(s)

Timothy Grotjohn

Ramon Diaz

Cristian Herrera-Rodriguez

Shengyuan Bai

Paul Quayle

Aaron Hardy

Matthias Muehle

Alec Fischer

Fernando Ponce

Elias Garratt

Co-Author(s)

Timothy Grotjohn¹,Ramon Diaz²,Cristian Herrera-Rodriguez¹,Shengyuan Bai¹,Paul Quayle²,Aaron Hardy³,Matthias Muehle³,Alec Fischer⁴,Fernando Ponce⁴,Elias Garratt¹

Michigan State University¹,Great Lakes Crystal Technologies²,Fraunhofer USA Center Midwest³,Arizona State University⁴

Keywords

diamond | plasma-enhanced CVD (PECVD) (chemical reaction)

Symposium Organizers

Robert Kaplar, Sandia National Laboratories

Srabanti Chowdhury, Stanford University

Yoshinao Kumagai, Tokyo University of Agriculture and Technology

Julien Pernot, University of Grenoble Alpes

Session Chairs

Hiroshi Kawarada

Robert Nemanich

2022 MRS Spring Meeting