May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF03.14.04
Silicon Dioxide Deposition in Polymer Using Sequential Infiltration Synthesis—In Situ FTIR Study
When and Where
May 23, 2022
11:15am - 11:30am
11:15am - 11:30am
MF03-Virtual
Presenter(s)
Co-Author(s)
Mahua Biswas3,1,Vepa Rozyyev1,2,Amelia Korveziroska3,Marcos Perez3,Anil Mane1,Jeffrey Elam1
Argonne National Laboratory1,The University of Chicago2,Illinois State University3
Keywords
atomic layer deposition | infrared (IR) spectroscopy | selective area deposition
Symposium Organizers
Aaron Franklin, Duke University
Joseph Andrews, University of Wisconsin
Thomas Anthopoulos, King Abdullah University of Science and Technology
Cinzia Casiraghi, University of Manchester
Session Chairs
Joseph Andrews
Vincenzo Pecunia