May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.08.03

Galvanic Corrosion Inhibition of Copper Film for Ruthenium Barrier Film Chemical Mechanical Planarization Slurry

When and Where

May 10, 2022
5:00pm - 7:00pm
Hawai'i Convention Center, Level 1, Kamehameha Exhibit Hall 2 & 3

Presenter(s)

Co-Author(s)

Gangyu Lee1,Sungmin Kim1,Hojin Jeong1,Taeseup Song1,Ungyu Paik1

Hanyang University1

Keywords

adsorption | corrosion | ion-solid interactions

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Santanu Bag
Mandakini Kanungo

In this Session