May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.06.06
Surface Passivation by ALD and CVD Nanolayers for Electronics and Photonics
When and Where
May 10, 2022
10:45am - 11:00am
10:45am - 11:00am
Hawai'i Convention Center, Level 3, 314
Presenter(s)
Co-Author(s)
Roel Theeuwes1,Erwin Kessels1,Willem-Jan Berghuis1,Marcel Verheijen1,Bart Macco1
Eindhoven Univ of Technology1
Keywords
atomic layer deposition | chemical vapor deposition (CVD) (deposition)
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Silvia Armini
Santanu Bag
Mandakini Kanungo
Adrie Mackus