May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ10.17.07
Nondestructive Characterization of the Structural and Mechanical Properties of Nanostructured Metalattices Using Coherent Extreme UV Scatterometry
When and Where
May 12, 2022
10:00am - 10:15am
10:00am - 10:15am
Hawai'i Convention Center, Level 3, 316C
Presenter(s)
Co-Author(s)
Joshua Knobloch1,Brendan McBennett1,Begoña Abad Mayor1,Emma Nelson1,Charles Bevis1,Sadegh Yazdi2,Amitava Adak1,Travis Frazer1,Jorge Hernández-Charpak1,Hiu Yan Cheng3,Alex Grede3,Pratibha Mahale3,Nabila Nova3,Tom Mallouk3,Noel Giebink3,John Badding3,Henry Kapteyn1,Margaret Murnane1
STROBE, JILA, University of Colorado Boulder1,University of Colorado Boulder2,The Pennsylvania State University3
Keywords
nanostructure | scanning transmission electron microscopy (STEM) | strength
Symposium Organizers
Ho Wai (Howard) Lee, University of California, Irvine
Viktoriia Babicheva, University of New Mexico
Arseniy Kuznetsov, Data Storage Institute
Junsuk Rho, Pohang University of Science and Technology
Symposium Support
Bronze
ACS Photonics
MRS-Singapore
Nanophotonics | De Gruyter
ACS Photonics
MRS-Singapore
Nanophotonics | De Gruyter
Session Chairs
Debashis Chanda
Arseniy Kuznetsov