May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.03.01
Towards Enhanced Sustainability in Future Plasma Processes
When and Where
May 9, 2022
1:30pm - 2:00pm
1:30pm - 2:00pm
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
Nathan Marchack1,Hiroyuki Miyazoe1,Luxherta Buzi1,John Papalia1,Hongwen Yan1,Sebastian Engelmann1,Robert Bruce1
IBM T.J. Watson Research Center1
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Jane Chang
Nathan Marchack