Plasma Enhanced Atomic Layer Deposition of Sodium Phosphorous Oxynitride

When and Where

May 11, 2022
3:45pm - 4:00pm

Hawai'i Convention Center, Level 3, 323A

Presenter(s)

Daniela Fontecha

R Nuwayhid

Alexander Kozen

David Stewart

Gary Rubloff

Keith Gregorczyk

Co-Author(s)

Daniela Fontecha¹,R Nuwayhid¹,Alexander Kozen¹,David Stewart¹,Gary Rubloff¹,Keith Gregorczyk¹

University of Maryland at College Park¹

Keywords

atomic layer deposition

Symposium Organizers

Xin Li, Harvard University

Neil Dasgupta, University of Michigan

Hong Zhu, Shanghai Jiao Tong University

Matthew McDowell, Georgia Institute of Technology

Symposium Support

Silver
Bio-Logic USA
Toyota Research Institute of North America

Bronze
Ampcera Inc.
BICI USA Co., LTD
Energy Material Advances, a Science Partner Journal | AAAS
Rogers Technologies (Suzhou) Co., Ltd.
Sphere Energy
Vigor Tech USA

Session Chairs

Minjeong Shin

Yuan Yang

Hongli Zhu

2022 MRS Spring Meeting