May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
SF10.12.04
Establishment of Control Method for Ferroelectric Properties in (Al1-xScx)N Films
When and Where
May 24, 2022
8:05am - 8:10am
8:05am - 8:10am
SF10-Virtual
Presenter(s)
Co-Author(s)
Shinnosuke Yasuoka1,Ryoichi Mizutani1,Reika Ota1,Takahisa Shiraishi1,Takao Shimizu2,Masato Uehara3,Hiroshi Yamada3,Morito Akiyama3,Hiroshi Funakubo1
Tokyo Institute of Technology1,National Institute for Materials Science2,Agency of Industrial Science and Technology3
Keywords
sputtering
Symposium Organizers
Symposium Support
Gold
JEOL Korea Ltd.
JEOL Korea Ltd.
Session Chairs
Young-Min Kim
Jaekwang Lee