May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.01.03

Plasma-assisted Atomic Layer Deposition of Monolayer AlOx on GaN for Surface Functionalization and Low-Resistance Contacts

When and Where

May 8, 2022
9:15am - 9:30am
Hawai'i Convention Center, Level 3, 314

Presenter(s)

Co-Author(s)

Alex Henning1,Johannes Bartl1,Maximilian Christis1,Andreas Zeidler1,Simon Qian1,Oliver Bienek1,Chang-Ming Jiang1,Claudia Paulus1,Bernhard Rieger1,Martin Stutzmann1,Ian Sharp1

Technical University of Munich1

Keywords

atomic layer deposition | electronic structure | III-V

Symposium Organizers

Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University

Symposium Support

Silver
Corning Inc

Bronze
NovaCentrix

Session Chairs

Silvia Armini
Santanu Bag

In this Session