May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
NM01.04.02
Scalable Back-End-of-Line Compatible Growth of WS2 Thin Films via Atomic Layer Deposition
When and Where
May 8, 2022
3:15pm - 3:30pm
3:15pm - 3:30pm
Hawai'i Convention Center, Level 3, 311
Presenter(s)
Co-Author(s)
Muhammed Juvaid Mangattuchali1,Chandan Das2,Hippolyte Astier1,John Sudijono2,Silvija Gradečak1
NUS Singapore1,Applied Materials, Inc.2
Keywords
atomic layer deposition | Raman spectroscopy
Symposium Organizers
Zakaria Al Balushi, University of California, Berkeley
Olga Kazakova, National Physical Laboratory
Su Ying Quek, National University of Singapore
Hyeon Jin Shin, Gwangju Institute of Science and Technology
Symposium Support
Bronze
Applied Physics Reviews | AIP Publishing
ATTOLIGHT AG
Penn State 2DCC-MIP
Applied Physics Reviews | AIP Publishing
ATTOLIGHT AG
Penn State 2DCC-MIP
Session Chairs
Zakaria Al Balushi
Anthony Salazar