May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
MF01.05.06
Effects of rf Frequency on Plasma Density in Capacitively Coupled Plasmas at Low Pressure Studied by Particle-in-Cell/Monte Carlo Collision Method
When and Where
May 10, 2022
2:45pm - 3:00pm
2:45pm - 3:00pm
Hawai'i Convention Center, Level 3, 319B
Presenter(s)
Co-Author(s)
Toshiaki Arima1,Tao Yang1,Kunihiro Kamataki1,Daisuke Yamashita1,Naoto Yamashita1,Takamasa Okumura1,Naho Itagaki1,Kazunori Koga1,Masaharu Shiratani1
Kyushu-University1
Keywords
densification | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Fumiyoshi Tochikubo, Tokyo Metropolitan University
Jane Chang, University of California, Los Angeles
Masaharu Shiratani, Kyushu University
David Staack, Texas A&M University
Symposium Support
Bronze
The Japan Society of Applied Physics
The Japan Society of Applied Physics
Session Chairs
Kazunori Koga
Fumiyoshi Tochikubo