May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
EQ06.09.08
Root Cause Detection of Excursion—An Empirical Study for Semiconductor Manufacturing
When and Where
May 23, 2022
9:45pm - 9:50pm
9:45pm - 9:50pm
EQ06-Virtual
Presenter(s)
Co-Author(s)
Youjin Lee1,2,Sangin Kim2,Chung-Sam Jun2,Yong-han Roh1
Sungkyunkwan University1,Samsung Electronics Co.2
Keywords
defects
Symposium Organizers
Santanu Bag, Air Force Research Laboratory
Silvia Armini, IMEC
Mandakini Kanungo, Corning Incorporated
Hong Zhao, Virginia Commonwealth University
Symposium Support
Silver
Corning Inc
Bronze
NovaCentrix
Corning Inc
Bronze
NovaCentrix
Session Chairs
Mandakini Kanungo
Ephraim Suhir
Gilad Zorn