May 8 - 13, 2022
Honolulu, Hawaii
May 23 - 25, 2022 (Virtual)
2022 MRS Spring Meeting
DS02.09.06
Simulation-Guided Thermal Process Discovery for Flash Lamp Annealing Crystallization of On-Chip HfO2-ZrO2 Ferroelectric Memories
When and Where
May 12, 2022
3:45pm - 4:00pm
3:45pm - 4:00pm
Hawai'i Convention Center, Level 3, 313C
Presenter(s)
Co-Author(s)
Manohar Karigerasi1,Balreen Saini2,Zhouchangwan Yu2,Doug Campen1,Apurva Mehta1,Paul McIntyre2,1,John Baniecki1
SLAC National Accelerator Laboratory1,Stanford University2
Keywords
atomic layer deposition | x-ray diffraction (XRD)
Symposium Organizers
Veruska Malavé, National Institute of Standards and Technology
Vitor Coluci, UNICAMP
Kun Fu, University of Delaware
Hui Ying Yang, SUTD
Symposium Support
Silver
National Institute of Standards and Technology (NIST)
National Institute of Standards and Technology (NIST)
Session Chairs
Vitor Coluci
Veruska Malavé