November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
NM07.03.27
Control of Degree of Structural Disorder in Amorphous Boron Nitride Film
When and Where
Nov 28, 2022
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall A
Presenter(s)
Co-Author(s)
Minsu Kim1,Hyeongjoon Kim1,Kyung Yeol Ma1,Hyeon Suk Shin1
Ulsan National Institute of Science and Technology1
Keywords
chemical vapor deposition (CVD) (deposition) | dielectric properties | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Jeehwan Kim, Massachusetts Institute of Technology
Sanghoon Bae, Washington University in Saint Louis
Deep Jariwala, University of Pennsylvania
Kyusang Lee, University of Virginia
Session Chairs
Sanghoon Bae
Vincent Tung