November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF03.01.06
Vertically Extended Channel Thin-Film Transistors Using Dry Etched Tungsten Gate for Ultra-High-Resolution Display
When and Where
Nov 29, 2022
11:15am - 11:30am
11:15am - 11:30am
Sheraton, 3rd Floor, Hampton
Presenter(s)
Co-Author(s)
Sein Lee1,Se-Yeon Jung1,Jeong-Min Park1,Jang-Yeon Kwon1
Yonsei University1
Keywords
chemical vapor deposition (CVD) (deposition) | reactive ion etching
Symposium Organizers
Wei-Hung Chiang, National Taiwan University of Science and Technology
Carla Berrospe-Rodríguez, University of California, Riverside
Fiorenza Fanelli, National Research Council (CNR)
Tsuyohito Ito, The University of Tokyo
Session Chairs
Wei-Hung Chiang
Chi-Chin Wu