November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ02.08.01
Angstrom-Scale Smoothing of Aluminum Nitride Film Surfaces Using Atomic Layer Etching
When and Where
Nov 29, 2022
3:00pm - 3:15pm
3:00pm - 3:15pm
Sheraton, 2nd Floor, Liberty B/C
Presenter(s)
Co-Author(s)
Haozhe Wang1,Azmain Hossain1,David Catherall1,Austin Minnich1
California Institute of Technology1
Keywords
atomic layer etching | quantum materials | thin film
Symposium Organizers
Viktoriia Babicheva, University of New Mexico
Antonio Ambrosio, Fondazione Istituto Italiano di Tecnologia
Cheng-Wei Qiu, National University of Singapore
Giulia Tagliabue, École Polytechnique Fédérale de Lausanne
Session Chairs
Antonio Ambrosio
Viktoriia Babicheva