Cooler-free operation (up to 120^oC) of microbolometers based on amorphous VO_x thermistor deposited at different growth temperatures

Dec 1, 2022
2:30pm - 2:45pm

Sheraton, 2nd Floor, Back Bay C

Dasom Wang

Ho Won Jang

Won Jun Choi

Dasom Wang^1,2,Ho Won Jang²,Dong Hee Park¹,Won Jun Choi¹

Korea Institute of Science and Technology¹,Seoul National University²

sputtering

Yu-Jung Lu, Academia Sinica

Artur Davoyan, University of California, Los Angeles

Ho Wai Howard Lee, University of California, Irvine

David Norris, ETH Zürich

Gold
Enli Technology Co., Ltd.

Bronze
ACS Photonics
De Gruyter
Taiwan Semiconductor Manufacturing Company

Seunghoon Han

Yu-Jung Lu

Cooler-free operation (up to 120oC) of microbolometers based on amorphous VOx thermistor deposited at different growth temperatures