November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF03.01.04
Controlling Surface Oxidation States for Precise Nanoscale Patterning of Etch-Resistant Materials
When and Where
Nov 29, 2022
10:45am - 11:00am
10:45am - 11:00am
Sheraton, 3rd Floor, Hampton
Presenter(s)
Co-Author(s)
Jane Chang1,Taylor Smith1,Ethan Crumlin2
University of California, Los Angeles1,Lawrence Berkeley National Laboratory2
Keywords
Cu
Symposium Organizers
Wei-Hung Chiang, National Taiwan University of Science and Technology
Carla Berrospe-Rodríguez, University of California, Riverside
Fiorenza Fanelli, National Research Council (CNR)
Tsuyohito Ito, The University of Tokyo
Session Chairs
Wei-Hung Chiang
Chi-Chin Wu