November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
DS02.08.11
Design of Showerheads Using Machine Learning for Optimizing Semiconductor Manufacturing Processes
When and Where
Nov 30, 2022
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall A
Presenter(s)
Co-Author(s)
Daniel Lim1,Zeqing Jin1,Meenakshi Mamunuru2,Sassan Roham2,Xueying Zhao2,Grace Gu1
University of California, Berkeley1,LAM Research Corporation2
Keywords
chemical vapor deposition (CVD) (chemical reaction)
Symposium Organizers
N M Anoop Krishnan, Indian Institute of Technology Delhi
Mathieu Bauchy, University of California, Los Angeles
Ekin Dogus Cubuk, Google
Grace Gu, University of California, Berkeley
Symposium Support
Bronze
Patterns, Cell Press
Patterns, Cell Press
Session Chairs
Grace Gu
N M Anoop Krishnan