November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF03.04.02
Deposition Kinetics in the Magnetron Sputter Deposition of Aluminum Doped Zinc Oxide Thin Films
When and Where
Nov 29, 2022
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall A
Presenter(s)
Co-Author(s)
James Doyle2,Yifei Sun1,Nadia Foo Kune2,Michael Klysinger2
Cornell University1,Macalester College2
Keywords
chemical composition | physical vapor deposition (PVD) | thin film
Symposium Organizers
Wei-Hung Chiang, National Taiwan University of Science and Technology
Carla Berrospe-Rodríguez, University of California, Riverside
Fiorenza Fanelli, National Research Council (CNR)
Tsuyohito Ito, The University of Tokyo
Session Chairs
Fiorenza Fanelli
Tsuyohito Ito