November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF02.08.04
Super Hydrophobic Polymeric Film for CMP Conditioner by Initiated Chemical Vapor Deposition (iCVD)
When and Where
Nov 29, 2022
8:00pm - 10:00pm
8:00pm - 10:00pm
Hynes, Level 1, Hall A
Presenter(s)
Co-Author(s)
Taeyoon Kim1,Chulwoo Bae1,Taesung Kim1
Sungkyunkwan University1
Keywords
chemical vapor deposition (CVD) (deposition)
Symposium Organizers
Ke Han, Florida State Univ
Alexander Goncharov, Carnegie Instution of Washington
Florence Lecouturier-Dupouy, CNRS-LNCMI
Wenge Yang, Center for High Pressure Science & Technology Advanced Research
Session Chairs
Alexander Goncharov
Wenge Yang