November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ07.12.04
Compressive Stress in Diamond Nanomembranes
When and Where
Nov 30, 2022
4:15pm - 4:30pm
4:15pm - 4:30pm
Sheraton, 2nd Floor, Independence East
Presenter(s)
Co-Author(s)
Ken Haenen1,2,Paulius Pobedinskas1,2
Hasselt University1,IMEC vzw2
Keywords
diamond | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Anke Krueger, Stuttgart University
Philippe Bergonzo, Seki Diamond Systems
Chia-Liang Cheng, National Dong Hwa University
Mariko Suzuki, University of Cádiz
Symposium Support
Silver
MUEGGE GmbH
Seki Diamond Systems
Bronze
Applied Diamond, Inc.
EDP Corporation
Fine Abrasives Taiwan CO., LTD.
Fraunhofer USA, Inc.
Qnami AG
MUEGGE GmbH
Seki Diamond Systems
Bronze
Applied Diamond, Inc.
EDP Corporation
Fine Abrasives Taiwan CO., LTD.
Fraunhofer USA, Inc.
Qnami AG
Session Chairs
Robert Bogdanowicz
Anke Krueger