November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
NM07.10.04
High-Quality SiC Remote Epitaxy for Stackable Electronics
When and Where
Dec 1, 2022
3:00pm - 3:30pm
3:00pm - 3:30pm
Hynes, Level 2, Room 203
Presenter(s)
Co-Author(s)
Rachael Myers-Ward1,D. Pennachio1,Jenifer Hajzus1,Andrew Lang1,R Stroud1
Naval Research Laboratory1
Keywords
chemical vapor deposition (CVD) (deposition) | morphology
Symposium Organizers
Jeehwan Kim, Massachusetts Institute of Technology
Sanghoon Bae, Washington University in Saint Louis
Deep Jariwala, University of Pennsylvania
Kyusang Lee, University of Virginia
Session Chairs
Rachael Myers-Ward