November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF03.01.03
Plasma-Enhanced Spatial ALD of SiO2 Investigated by Gas-Phase Infrared and Optical Emission Spectroscopy
When and Where
Nov 29, 2022
10:30am - 10:45am
10:30am - 10:45am
Sheraton, 3rd Floor, Hampton
Presenter(s)
Co-Author(s)
Erwin Kessels1,Maria Mione1,Vincent Vandalon1,Alfredo Mameli2,Fred Roozeboom1,2
Eindhoven Univ of Technology1,TNO/Holst2
Keywords
atomic layer deposition | in situ | Si
Symposium Organizers
Wei-Hung Chiang, National Taiwan University of Science and Technology
Carla Berrospe-Rodríguez, University of California, Riverside
Fiorenza Fanelli, National Research Council (CNR)
Tsuyohito Ito, The University of Tokyo
Session Chairs
Wei-Hung Chiang
Chi-Chin Wu