November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ09.01.03

Low Temperature Fabrication of 3D Integrated CMOS Devices by Via-Hole-Less Structure on Flexible Substrate

When and Where

Nov 28, 2022
10:45am - 11:00am
Sheraton, 2nd Floor, Back Bay D

Presenter(s)

Co-Author(s)

Seongcheol Jang1,Hyun-Suk Kim1

Chungnam National University1

Keywords

physical vapor deposition (PVD)

Symposium Organizers

Ying-Hao Chu, National Tsing Hua University
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
Olga Ovchinnikova, Oak Ridge National Laboratory
Bhagwati Prasad, Indian Institute of Science

Symposium Support

Bronze
CRYOGENIC LIMITED

Session Chairs

Catherine Dubourdieu
Olga Ovchinnikova

In this Session