November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
NM06.13.05
Photoresist-Free and Large-Area Patterning Method for van der Waals Materials via Direct Optical Lithography
When and Where
Dec 2, 2022
2:30pm - 2:45pm
2:30pm - 2:45pm
Hynes, Level 2, Room 207
Presenter(s)
Co-Author(s)
Seong Rae Cho1,Seonghun Ahn1,Seung Hyung Lee1,Heonhak Ha1,Tae Soo Kim1,Min-kyung Jo1,2,Chanwoo Song1,Tae Hong Im1,Pragya Rani1,Minseung Gyeon1,Kiwon Cho1,Seungwoo Song2,Min Seok Jang1,Yong-Hoon Cho1,Keon Jae Lee1,Kibum Kang1
Korea Advanced Institute of Science and Technology1,Korea Research Institute of Standards and Science2
Keywords
laser ablation | laser decomposition | lithography (removal)
Symposium Organizers
Nicholas Glavin, Air Force Research Laboratory
Aida Ebrahimi, The Pennsylvania State University
SungWoo Nam, University of California, Irvine
Won Il Park, Hanyang University
Symposium Support
Bronze
MilliporeSigma
MilliporeSigma
Session Chairs
Nicholas Glavin
SungWoo Nam