November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ09.16.05
Thickness Scaling and Low Voltage Operation of Ferroelectric (Al1-xScx)N Films Prepared by Sputtering Method
When and Where
Dec 7, 2022
10:30pm - 10:45pm
10:30pm - 10:45pm
EQ09-virtual
Presenter(s)
Co-Author(s)
Hiroshi Funakubo1,Shinnosuke Yasuoka1,Ryoichi Mizutani1,Takahisa Shiraishi2,1,Akinori Tateyama1,Reika Ota1,Kazuki Okamoto1,Takao Shimizu3,1,Masato Uehara4,Hiroshi Yamada4,Morito Akiyama4
Tokyo Institute of Technology1,Kumamoto University2,NIMS3,National Institute of Advanced Industrial Science and Technology (AIST)4
Keywords
nitride | sputtering
Symposium Organizers
Ying-Hao Chu, National Tsing Hua University
Catherine Dubourdieu, Helmholtz-Zentrum Berlin / Freie Universität Berlin
Olga Ovchinnikova, Oak Ridge National Laboratory
Bhagwati Prasad, Indian Institute of Science
Symposium Support
Bronze
CRYOGENIC LIMITED
CRYOGENIC LIMITED
Session Chairs
Ying-Hao Chu
Chih-huang Lai