November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
SF03.09.04
Influence of a Remote Plasma on the Chemical Vapour Deposition of ZrO2 Based Layers
When and Where
Dec 1, 2022
11:15am - 11:30am
11:15am - 11:30am
Sheraton, 3rd Floor, Hampton
Presenter(s)
Co-Author(s)
Philipp Maaß1,Vitali Bedarev1,Sebastian Beer1,Marina Prenzel1,Marc Böke1,Anjana Devi1,Achim von Keudell1
Ruhr-University Bochum1
Keywords
plasma-enhanced CVD (PECVD) (deposition) | Zr
Symposium Organizers
Wei-Hung Chiang, National Taiwan University of Science and Technology
Carla Berrospe-Rodríguez, University of California, Riverside
Fiorenza Fanelli, National Research Council (CNR)
Tsuyohito Ito, The University of Tokyo
Session Chairs
Carla Berrospe-Rodríguez
Achim von Keudell