High Hydrogen Impurity—A hidden Role Aggravating PECVD Amorphous SiN_x Coating Cracking

Nov 29, 2022
9:00am - 9:15am

Sheraton, 5th Floor, Public Garden

Yutao Dong

Xin Yin

Xudong Wang

Yutao Dong¹,Xin Yin¹,Xudong Wang¹

University of Wisconsin-Madison¹

ceramic | plasma-enhanced CVD (PECVD) (chemical reaction) | strength

Christos Athanasiou, Georgia Institute of Technology

Florian Bouville, Imperial College London

Hortense Le Ferrand, Nanyang Technological University

Izabela Szlufarska, University of Wisconsin

Christos Athanasiou

Eduardo Saiz

High Hydrogen Impurity—A hidden Role Aggravating PECVD Amorphous SiNx Coating Cracking