November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
CH01.04.03
Study of Ultra-Thin ALD Grown Gallium Oxide Films by In Situ Ellipsometry with Unambiguous Thickness and Optical Property Determination
When and Where
Nov 29, 2022
2:15pm - 2:30pm
2:15pm - 2:30pm
Hynes, Level 1, Room 102
Presenter(s)
Co-Author(s)
Florian Maudet1,Sourish Banerjee1,Hanno Kröncke1,Sven Wiesner1,Veeresh Deshpande1,Catherine Dubourdieu1,2
Helmholtz-Zentrum Berlin für Materialien und Energie1,Freie Universität Berlin2
Keywords
atomic layer deposition | in situ
Symposium Organizers
Dongsheng Li, Pacific Northwest National Laboratory
Qian Chen, University of Illinois at Urbana-Champaign
Yu Han, King Abdullah University of Science and Technology
Barnaby Levin, Direct Electron LP
Symposium Support
Bronze
King Abdullah University of Science and Technology
MilliporeSigma
King Abdullah University of Science and Technology
MilliporeSigma
Session Chairs
Peter Crozier
Andrej Kuznetsov