Growth of High-Crystalline α-Ga₂O₃ Thin Films on Sapphire Substrates Using Template Engineering for High Voltage α-Ga₂O₃Power Devices

Nov 28, 2022
4:15pm - 4:30pm

Sheraton, 3rd Floor, Gardner A/B

Duyoung Yang

Yongjo Park

Ho Won Jang

Byoungsoo Kim¹,Duyoung Yang¹,Yongjo Park¹,Ho Won Jang¹

Seoul National University¹

electrical properties | epitaxy | thin film

Yuanyuan Zhou, Hong Kong Baptist University

Carmela Aruta, National Research Council

Panchapakesan Ganesh, Oak Ridge National Laboratory

Hua Zhou, Argonne National Laboratory

Hyeon Han

Hua Zhou

Growth of High-Crystalline α-Ga2O3 Thin Films on Sapphire Substrates Using Template Engineering for High Voltage α-Ga2O3 Power Devices