Raffaella Calarco¹,Adriano Diaz Fattorini¹,Marco Bertelli¹,Sara De Simone¹,Valentina Mussi¹,Francesco De Nicola¹,Massimo Longo¹,Giuseppe D'Arrigo¹,Inaki Garcia Lopez¹,Antonella Sciuto¹,Stefania Privitera¹,Massimo Borghi²,Andrea Redaelli²,Marie-Claire Cyrille³,Nguyet-Phuong Tran³

Consiglio Nazionale delle Ricerce¹,STMicroelectronics²,LETI³

Keywords

sputtering | thin film | x-ray diffraction (XRD)

Symposium Organizers

Wei Zhang, Xi'an Jiaotong University

Valeria Bragaglia, IBM Research Europe - Zurich

Juejun Hu, Massachusetts Institute of Technology

Andriy Lotnyk, Leibniz Institute of Surface Engineering

Session Chairs

Ali Adibi

Qian Wang

2022 MRS Fall Meeting

Improving Crystallization Temperature by Ge-Incorporation in GexSbyTez Phase Change Alloys and Heterostructures for Automotive Applications

When and Where

Presenter(s)

Co-Author(s)

Keywords

Symposium Organizers

Session Chairs

In this Session

Improving Crystallization Temperature by Ge-Incorporation in Ge_xSb_yTe_z Phase Change Alloys and Heterostructures for Automotive Applications