November 27 - December 2, 2022
Boston, Massachusetts
December 6 - 8, 2022 (Virtual)
2022 MRS Fall Meeting
EQ06.06.03
Atomic Layer Deposition Integration of Amorphous Boron Nitride with 2D Semiconductors
When and Where
Nov 30, 2022
9:15am - 9:30am
9:15am - 9:30am
Sheraton, 2nd Floor, Back Bay B
Presenter(s)
Co-Author(s)
Cindy Chen1,Yu-Chuan Lin1,Riccardo Torsi1,Ke Wang1,Haiying Wang1,Bangzhi Liu1,Jessica Kachian2,Joshua Robinson1
The Pennsylvania State University1,Intel Corporation2
Keywords
2D materials | atomic layer deposition | dielectric properties
Symposium Organizers
Xu Zhang, Carnegie Mellon University
Monica Allen, University of California, San Diego
Ming-Yang Li, TSMC
Doron Naveh, Bar-Ilan Univ
Session Chairs
Doron Naveh
Xu Zhang