April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL04.02.01
Late News: A Comprehensive Study of MOVPE Growth on 200 mm GaN-on-SOI for Monolithic Integrated GaN ICs
When and Where
Apr 18, 2021
1:00pm - 1:15pm
1:00pm - 1:15pm
EL04
Presenter(s)
Co-Author(s)
Ming Zhao1,Karen Geens1,Xiangdong Li1,Nooshin Amirifar1,Stefaan Decoutere1
imec1
Keywords
nitride | vapor phase epitaxy (VPE)
Symposium Organizers
Hongping Zhao, The Ohio State University
Masataka Higashiwaki, National Institute of Information & Comm Tech
Robert Kaplar, Sandia National Laboratories
Julien Pernot, University of Grenoble
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Bruno Daudin
Robert Kaplar