April 17 - 23, 2021

April 17 - 23, 2021 (Virtual)

2021 MRS Spring Meeting

EL09.14.02

Late News: Low Temperature (350 °C) Annealing for Ferroelectric Hf0.5Zr0.5O2 Thin Films

When and Where

Apr 20, 2021
9:25pm - 9:40pm

EL09

Presenter(s)

Zhouchangwan Yu

Balreen Saini

Fei Huang

Wilman Tsai

Paul McIntyre

Co-Author(s)

Zhouchangwan Yu¹,Balreen Saini¹,Fei Huang¹,Wilman Tsai¹,Paul McIntyre¹

Stanford University¹

Keywords

atomic layer deposition

Symposium Organizers

Asif Khan, Georgia Institute of Technology

Ru Huang, Peking University

Changhwan Shin, Sungkyunkwan University

Pavlo Zubko, University College London

Session Chairs

Masaharu Kobayashi

Changhwan Shin

In this Session