April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL08.01.01

The Search for the Most Conductive Interconnect Metal <10 nm

When and Where

Apr 23, 2021
2:20pm - 2:45pm
EL08

Presenter(s)

Co-Author(s)

Daniel Gall1

Rensselaer Polytechnic Institute1

Keywords

electrical properties | epitaxy

Symposium Organizers

Silvia Armini, IMEC
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, University of Yamanashi
Andrew Simon, IBM T.J. Watson Research Center

Symposium Support

Bronze
MilliporeSigma

Session Chairs

Silvia Armini
Andrew Simon

In this Session