Structural Analysis of Ion Implanted and Exfoliated (010) and (-201) β-Ga₂O₃

When and Where

Apr 19, 2021
9:15pm - 9:30pm

EL04

Presenter(s)

Michael Liao

Yekan Wang

Kenny Huynh

Fengwen Mu

Tiangui You

Wenhui Xu

Zhe Cheng

Jingjing Shi

Tadatomo Suga

Xin Ou

Samuel Graham

Mark Goorsky

Co-Author(s)

Michael Liao¹,Yekan Wang¹,Kenny Huynh¹,Fengwen Mu²,Tiangui You³,Wenhui Xu³,Zhe Cheng⁴,Jingjing Shi⁴,Tadatomo Suga⁵,Xin Ou³,Samuel Graham⁴,Mark Goorsky¹

University of California, Los Angeles¹,Institute of Microelectronics of Chinese Academy of Science²,Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences³,Georgia Institute of Technology⁴,Meisei University⁵

Keywords

oxide | transmission electron microscopy (TEM) | x-ray diffraction (XRD)

Symposium Organizers

Hongping Zhao, The Ohio State University

Masataka Higashiwaki, National Institute of Information & Comm Tech

Robert Kaplar, Sandia National Laboratories

Julien Pernot, University of Grenoble

Symposium Support

Silver
Taiyo Nippon Sanso

Session Chairs

Nasim Alem

Masataka Higashiwaki

Hongping Zhao

2021 MRS Spring Meeting

Structural Analysis of Ion Implanted and Exfoliated (010) and (-201) β-Ga2O3