April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL04.12.01
Boron Incorporation in Monocrystalline CVD Diamond Films for Schottky Barrier Diodes
When and Where
Apr 20, 2021
2:15pm - 2:40pm
2:15pm - 2:40pm
EL04
Presenter(s)
Co-Author(s)
Ken Haenen1,2
Hasselt University1,imec vzw2
Keywords
diamond | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Hongping Zhao, The Ohio State University
Masataka Higashiwaki, National Institute of Information & Comm Tech
Robert Kaplar, Sandia National Laboratories
Julien Pernot, University of Grenoble
Symposium Support
Silver
Taiyo Nippon Sanso
Taiyo Nippon Sanso
Session Chairs
Jocelyn Achard
Nicolas Rouger