April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
ST01.12.01
Measurement of Hardness and Elastic Modulus by Depth Sensing Indentation—Improvements to the Technique Based on Continuous Stiffness Measurement
When and Where
Apr 20, 2021
2:15pm - 2:40pm
2:15pm - 2:40pm
ST01
Presenter(s)
Co-Author(s)
Warren Oliver1,Phani Sudharshan2,George Pharr3
KLA Corporation1,ARCI2,Texas A&M University3
Keywords
elastic properties | hardness | strength
Symposium Organizers
Gi-Dong Sim, Korea Advanced Institute of Science and Technology
Wendy Gu, Stanford University
Matt Pharr, Texas A&M University
Jagannathan Rajagopalan, Arizona State University
Session Chairs
Jagannathan Rajagopalan
Gi-Dong Sim