April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL08.02.02
Atomic Precision Advanced Manufacturing (APAM) of Ultra-Doped Nanostructures for Advanced CMOS Devices and Interconnects
When and Where
Apr 23, 2021
5:40pm - 5:55pm
5:40pm - 5:55pm
EL08
Presenter(s)
Co-Author(s)
David Scrymgeour1,Esther Frederick1,Connor Halsey1,DeAnna Campbell1,Evan Anderson1,Scott Schmucker1,Andrew Leenheer1,Xujiao Gao1,Jeffrey Ivie1,Tzu-Ming Lu1,Lisa Tracy1,Shashank Misra1
Sandia National Laboratories1
Keywords
2D materials | lithography (deposition)
Symposium Organizers
Silvia Armini, IMEC
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, University of Yamanashi
Andrew Simon, IBM T.J. Watson Research Center
Symposium Support
Bronze
MilliporeSigma
MilliporeSigma
Session Chairs
Vincent Jousseaume
Andrew Simon