Controlled Synthesis and Electronic Structure Engineering of Metastable Ta₂N₃ via Oxygen Incorporation

Apr 23, 2021
3:45pm - 4:00pm

EL03

Laura Wagner

Ian Sharp

Chang-Ming Jiang¹,Laura Wagner¹,Johanna Eichhorn¹,Ian Sharp¹

Technische Universität München¹

electrical properties | nitride | physical vapor deposition (PVD)

Hao Zeng, SUNY-Buffalo

Elif Ertekin, University of Illinois at Urbana-Champaign

Rafael Jaramillo, Massachusetts Institute of Technology

Yi-Yang Sun, Shanghai Institute of Ceramics, Chinese Academy of Sciences

Bronze
Army Research Office

George Nolas

Kimberly See

Controlled Synthesis and Electronic Structure Engineering of Metastable Ta2N3 via Oxygen Incorporation