April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
ST03.04.02

Mechanical and Structural Properties of Nanostructured Metalattices Probed by Coherent EUV Beams

When and Where

Apr 20, 2021
6:10pm - 6:25pm
ST03

Presenter(s)

Co-Author(s)

Begoña Abad Mayor1,2,Joshua Knobloch1,Travis Frazer1,Jorge Nicolas Hernandez Charpak1,Hiu Yan Cheng3,Alex Grede3,Noel Giebink3,Tom Mallouk3,Pratibha Mahale3,Nabila Nova3,Andrew Tomaschke1,Virginia Ferguson1,Vincent Crespi3,Venkatraman Gopalan3,Henry Kapteyn1,John Badding3,Margaret Murnane1

University of Colorado Boulder1,University of Basel2,The Pennsylvania State University3

Keywords

elastic properties | metrology | nanostructure

Symposium Organizers

Dongchan Jang, Korea Advanced Institute of Science and Technology
Woo Soo Kim, Simon Fraser University
Lucas Meza, University of Washington
Ruth Schwaiger, Forschungszentrum Juelich GmbH

Session Chairs

In-Suk Choi
Dongchan Jang

In this Session