April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL09.04.01

Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films

When and Where

Apr 18, 2021
9:00pm - 9:25pm
EL09

Presenter(s)

Co-Author(s)

Hiroshi Funakubo1,Takanori Mimura1,Reijiro Shimura1,Yoshiko Nakamura1,Takao Shimizu1,2

Tokyo Institute of Technology1,National Institute for Materials Science2

Keywords

Hf | oxide

Symposium Organizers

Asif Khan, Georgia Institute of Technology
Ru Huang, Peking University
Changhwan Shin, Sungkyunkwan University
Pavlo Zubko, University College London

Session Chairs

Kisung Chae
Changhwan Shin

In this Session