April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL09.04.01
Stability and Room Temperature Deposition of Ferroelectric Phase in Y-Doped (Hf, Zr)O2 Films
When and Where
Apr 18, 2021
9:00pm - 9:25pm
9:00pm - 9:25pm
EL09
Presenter(s)
Co-Author(s)
Hiroshi Funakubo1,Takanori Mimura1,Reijiro Shimura1,Yoshiko Nakamura1,Takao Shimizu1,2
Tokyo Institute of Technology1,National Institute for Materials Science2
Keywords
Hf | oxide
Symposium Organizers
Asif Khan, Georgia Institute of Technology
Ru Huang, Peking University
Changhwan Shin, Sungkyunkwan University
Pavlo Zubko, University College London
Session Chairs
Kisung Chae
Changhwan Shin