April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL03.04.03
Characteristics of Silicon Nitride Thin Film with Plasma Treatment
When and Where
Apr 22, 2021
8:55pm - 9:00pm
8:55pm - 9:00pm
EL03
Presenter(s)
Co-Author(s)
Chanwon Jung1,Seokhwi Song1,Suhyeon Park1,Byunguk Kim1,Youngjoon Kim1,Eunjong Lee1,Sunggwon Lee1,Taehun Park1,Hyeongtag Jeon1
Hanyang University1
Keywords
atomic layer deposition | nitride
Symposium Organizers
Hao Zeng, SUNY-Buffalo
Elif Ertekin, University of Illinois at Urbana-Champaign
Rafael Jaramillo, Massachusetts Institute of Technology
Yi-Yang Sun, Shanghai Institute of Ceramics, Chinese Academy of Sciences
Symposium Support
Bronze
Army Research Office
Army Research Office
Session Chairs
Chen Ming
Yi-Yang Sun