April 17 - 23, 2021
April 17 - 23, 2021 (Virtual)
2021 MRS Spring Meeting
EL08.01.04
Two-Step Approach for Conformal Chemical Vapor-Phase Deposition of Ultra-Thin Conductive Silver Films
When and Where
Apr 23, 2021
3:15pm - 3:30pm
3:15pm - 3:30pm
EL08
Presenter(s)
Co-Author(s)
Sabrina Wack1,Petru Lunca Popa1,Noureddine Adjeroud1,Christèle Vergne1,Renaud Leturcq1
Luxembourg Institute of Science & Technology1
Keywords
metal | plasma-enhanced CVD (PECVD) (deposition)
Symposium Organizers
Silvia Armini, IMEC
Vincent Jousseaume, CEA-LETI
Eiichi Kondoh, University of Yamanashi
Andrew Simon, IBM T.J. Watson Research Center
Symposium Support
Bronze
MilliporeSigma
MilliporeSigma
Session Chairs
Silvia Armini
Andrew Simon